X/Y axis travel 11.81_7.87?
Z axis travel 7.87″
Metal stage size 19.69_12.99″
Glass stage size 13.78_9.84″
Resolution of X/Y/Z axis .00002″
Repeatability .00008″
Optical magnification 10X~100X
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Insize 7230, SCRIBER, 6928640320064 