X/Y axis travel 9.84_5.91?
Z axis travel 7.87″
Metal stage size 17.72_11.02″
Glass stage size 12.05_7.72″
Resolution of X/Y/Z axis .00002″
Repeatability .00008″
Optical magnification 10X~100X
X/Y axis travel 9.84_5.91?
Z axis travel 7.87″
Metal stage size 17.72_11.02″
Glass stage size 12.05_7.72″
Resolution of X/Y/Z axis .00002″
Repeatability .00008″
Optical magnification 10X~100X
